A subset of MIT.nano capabilities are located in the Gordon Stanley Brown Building (Building 39). These facilities consist primarily of three cleanroom labs offering varying degrees of flexibility and cleanliness levels:
The Integrated Circuits Laboratory (ICL)
See the list of ICL tools.
Located on the second floor, ICL is a CMOS-compatible device fabrication facility comprised of:
- 2,800 sq.-ft Class 10 clean space
- 4,000 sq.-ft support space
The Technology Research Laboratory (TRL)
See the list of TRL tools.
Located on the fourth floor, TRL is a semiconductor device fabrication facility that includes gold-compatible tools; it is comprised of:
- 2,200 sq.-ft class 100 clean space
- 1,400 sq.-ft support space
The Exploratory Materials Laboratory (EML)
See the list of EML tools.
Located on the fifth floor, EML is a flexible, thin film deposition lab, where a great variety of materials can be processed. It consists of:
- 2,100 sq.-ft class 10,000 clean space