The Sigma 300 SEM, from Zeiss, is a field emission scanning electron microscope. The instrument is located in the lower level cleanroom of MIT.nano and offers a superior low kV performance approaching 1.5 nm at 1kV.
Specifications/Capabilities
- Magnification: x10-1M
- Acceleration: Voltage 0.02-30kV
- Probe current: 3pA-20nA
- 5-axes motorized eucentric specimen stage (X,Y=130mm, Z=50mm, T=-3deg-70deg, R-360deg)
Detectors
- Everhart Thornley Secondary Electron Detector
- Inlens Secondary Electron Detector
Related Tools
Gemini 450 SEM
Sigma HD VP SEM
Hitachi Regulus 8100 SEM
Staff/Contact
Connor Moorman
12-0184
James M. Daley
12-0184
Anna Osherov, PhD
12-5005
Reservation Rules
Obtaining access to the cleanroom is a prerequisite for SIGMA 300 SEM training and usage
Location
MIT.nano lower level cleanroom 16L (1110FD)
60 Vassar Street (rear)
Cambridge, MA