Hitachi Regulus 8100 SEM, is a field emission scanning electron microscope. The instrument is located in the 3rd level cleanroom of MIT.nano and offers a superior low kV performance approaching 1.1 nm at 1kV.
Specifications/Capabilities
- Magnification: x20-1M
- Acceleration: Voltage 0.5-30kV
- Probe current: up to 20nA
- 5-axes motorized eucentric specimen stage (X,Y=50mm, Z=30mm, T=-5deg-70deg, R-360deg)
Detectors
- Everhart Thornley Secondary Electron Detector
- Inlens Secondary Electron Detector
- EDS Detector
Related Tools
Gemini 450 SEM
Zeiss Sigma 300 SEM
Sigma HD VP SEM
Staff/Contact
Connor Moorman
12-0184
James M. Daley
12-0184
Anna Osherov, PhD
12-5005
Reservation Rules
Obtaining access to the cleanroom is a prerequisite for Hitachi Regulus 8100 SEM training and usage
Location
MIT.nano 3rd level cleanroom
60 Vassar Street (rear)
Cambridge, MA